Sputtering of surfaces by ion irradiation: A comparison of molecular dynamics and binary collision approximation models to laboratory measurements

We compare various sputtering simulation methods to experimental results in both the low energy (<1 keV) and high (?1 impact regimes for argon ions impacting a pure copper substrate at normal incidence. Our indicate that impacts, binary collision approximation (BCA) molecular dynamics can be used generate reasonable predictions yield distribution of sputtered atoms. also find agreement between theoretical down energies 600 eV. However, 200 eV energies, significant discrepancies appear ejecta distributions peak position, width distribution, magnitude tail. These arise from being only atoms surface, whereas are integrated over all 2? solid angles above surface. Using BCA code SDTrimSP limiting emitted within ±15° surface brings theory experiment into agreement. suggest is highly dependent on emission angle ejecta.